@article{Deeg_2019, title={The challenges of implementing a Field Emission Gun into a desktop Scanning Electron Microscope – a product development story}, volume={30}, url={https://www.pagepressjournals.org/microscopie/article/view/8126}, DOI={10.4081/microscopie.2019.8126}, abstractNote={<p>Desktop scanning electron microscopes (SEMs) are a relatively new product category. They are smaller, easier to use and faster than conventional SEM systems. However, their resolution is generally not as good. In order to reach ultra-high resolutions of three nanometers and below, the use of a high-voltage field emission gun (FEG) as the electron source is required. In 2018, <em>Thermo Fisher Scientific</em> succeeded, for the first time, in implementing a FEG into a commercial desktop SEM. Several challenges had to be overcome – such as reaching ultra-high vacuum levels within such a small system. The <em>Thermo Scientific<sup>TM</sup></em> <em>Phenom Pharos Desktop SEM </em>now provides a resolution smaller than three nanometers, roughly three to five times better than most other desktop SEM models.</p>}, number={1}, journal={Microscopie}, author={Deeg, Janosch}, year={2019}, month={Mar.} }